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4-Inch P-Grade Semi-Insulating Sic Substrate Sic Wafer

Price $685.00
Min Order 5 piece
Availability In Stock
Shipping From Zhejiang, China
Popularity 414 people viewed
Application:
Diode, Power Electronic Components
Certification:
CCC, RoHS
Manufacturing Technology:
Pvt
Material:
6n Sic Powder
Model:
N-Type
Package:
Epi-Ready with Vacuum Packaging
Type:
N-Type Semiconductor
Polytype:
4h
Surface Orientation on-Axis:
<0001>
Ttv:
≤5μm
Ltv:
≤3μm(10mm*10mm)
Metal Impurities:
≤5e12atoms/Cm2
Trademark:
HC
Transport Package:
Multi-Waferorsingle Wafer Cassette Packaging
Specification:
4Inch
Origin:
China
HS Code:
2849200000
Product Description
        Semi-insulating silicon carbide substrates are single crystal slices formed by cutting, grinding, polishing, cleaning and other processes of semi-insulating silicon carbide crystals. As an important raw material for the third-generation semiconductors, single crystal substrate slices can be made into silicon carbide-based radio frequency devices through heteroepitaxial growth and device manufacturing. They are important basic materials for the development of the third-generation semiconductor industry. In order to meet customer demand for 4,6-inch products, the company provides domestic and foreign customers with 4,6-inch semi-insulating substrate products with high cost performance in batches.

Downstream products and applications
     High-purity semi-insulated silicon carbide single crystal substrate is mainly used in 5G communication, radar system, seeker, satellite communication, aircraft and other fields, with the advantages of improving the radio frequency range, ultra-long distance recognition, anti-interference, high-speed, large-capacity information transmission and other applications, and is regarded as the most ideal substrate for the production of microwave power devices.

                                                                                                                                                                                     6 4 Inch High Purity Semi-insulating SiC Substrate
No.ItemsUnitProduction GradeDummy Grade
1.Crystal Parameters
1.1Polytype--4H4H
1.2Surface orientation on-axis--<0001><0001>
1.3Surface orientation off-axis°0±0.2°0±0.2°
1.4(0004)(FWHM)arcsec45arcsec100arcsec
2. Electrical Parameters
2.1 Type--HPSIHPSI
2.2 Resistivityohm·cm1E10ohm·cm70% area>1E5ohm·cm
3.Mechanical Parameters
3.1Diametermm99.5~100mm99.5~100mm
3.2 Thicknessμm500±25μm500±25μm
3.3 Notch orientation°[1-100]±5°[1-100]±5°
3.4 Notch Depthmm1~1.25mm1~1.25mm
3.5 LTVμm≤2μm(5mm*5mm)NA
3.6 TTVμm5μm15μm
3.7 Bowμm-15μm~15μm-45μm~45μm
3.8 Warpμm≤20μm50μm
3.9(AFM) Front (Si-face) RoughnessnmRa0.2nm(5μm*5μm)Ra0.2nm(5μm*5μm)
4.Structure
4.1 Micropipe densityea/cm21 ea/cm210ea/cm2
4.2 Carbon inclusions densityea/cm21 ea/cm2NA
4.3Hexagonal void--NoneNA
4.4Metal impuritiesatoms/cm25E12NA
5. Quality
5.1 Front--SiSi
5.2 Surface Finish--CMP Si-face CMPCMP Si-face CMP
5.3 Particlesea/wafer60(size0.3μm)NA
5.4 Scratchesea/mm≤2 ,Total LengthDiameterNA
5.5 Orange
peel/pits/stains/striations/cracks/contamination
--NoneNA
5.6Edge chips/indents/fracture--NoneNone
5.7Polytype areas--None30% (Cumulative area)
5.8 Front laser marking--NoneNone
6. Back Quality
6.1 Back finish--C-face CMP C-face CMP
6.2 Scratchesea/mm,Total Length2*DiameterNA
6.3 Back defects (edge
chips/indents)
--NoneNone
6.4 Back roughnessnmRa0.2nm(5μm*5μm)Ra0.2nm(5μm*5μm)
6.5 Back laser marking--SEMI,NOTCHSEMI,NOTCH
6.6 Edge-- Chamfer Chamfer
Notes: "NA"means no request. Items not metioned may refer to SEMI-STD.
FAQ
Q1: What's the way of shipping ?
A:  We accept DHL, Fedex, TNT, UPS, EMS, SF and etc.
Q2: How to pay?
A:  T/T, PayPal and etc..
Q3: What's the deliver time?
A:  For inventory: the delivery time is 10 workdays.   For customized products: the delivery time is 10to 25 workdays. According to the quantity.
Q4: Can I customize the products based on my need?
A:  A: Yes, we can customize the specifications according to your needs.
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