Advanced Control System for Optimum Performance of Multiple-Effect Evaporator in Semiconductor Industry

Forced Circulation evaporator
These systems can be either single or multiple effects and the vapor re-compression concept (either thermal or mechanical) is often applied. Usually, they operate from low vacuum to atmosphere pressure.
As a rule, these units are used for high evaporation rates and when crystal size is not of the utmost importance or if crystal grows at a fair rate.
Almost any material of construction can be considered for the fabrication of these evaporator

Typical products are:
- NaCL - KCL- NH4CL- BaCL2-CaCL2-MgCL2 etc
- Na2SO4-K2 SO4-(NH4)2SO4- ZnSO4-MnSO4-MgSO4-NiSO4 etc
-Na2SO3-Na2S -Na2CO3-K2SO3-NaAC-etc




Model
Single-effects
Double-effects
Triple-effects
Four-effect
Water evaporated Kg/h
1000
1000
1000
1000
Steam Pressure Mpa
≥0.4
≥0.4
≥0.4
≥0.4
Steam cost Kg/h
800
500
330
290
Cooling water cost(32 inlet 40 outlet) T/h
90
40
27
18