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High Puritytrichlorosilane Gas 99.99% 4n
| Price | Negotiable |
|---|---|
| Min Order | 50 kg |
| Availability | In Stock |
| Shipping From | Jiangsu, China |
| Popularity | 516 people viewed |
Model NO.:
SiHCl3
CAS No.:
7783-82-6
Formula:
Sihcl3
EINECS:
7783-82-6
Certification:
CE, RoHS, ISO
Purity:
99.99%
Type:
Chloride
Grade Standard:
Electron Grade
Trademark:
kaimei
Transport Package:
Cylinder, Canister
Specification:
40L, 200L
Origin:
Suzhou
HS Code:
2812190091
Product Description
Trichlorosilane is a silicon precursor for epitaxial silicon-containing thin films, especially for the
preparation of starting wafers.
Specifications:
Package type:
Company Information:
Jiangsu Kaimei Electronic Material Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
preparation of starting wafers.
Specifications:
| Test items | Unit | Test Result | |
| Components | Purity | % | 99.990 |
| Other CHLOROSILANE | % | 0.010 | |
Impurities | Co | ppb | 0.01 |
| Cr | ppb | 0.01 | |
| Cu | ppb | 0.01 | |
| Fe | ppb | 0.06 | |
| Mn | ppb | 0.01 | |
| Ni | ppb | 0.01 | |
| V | ppb | 0.01 | |
| B | ppb | 0.01 | |
| Al | ppb | 0.01 | |
| P | ppb | 0.01 | |
| As | ppb | 0.01 | |
| Mo | ppb | 0.01 | |
| Total metal impurities | ppb | <1.00 | |
| P+As | ppb | 0.02 | |
| C | ppm | <0.01 | |
| Gas Density | / | 4.7 | |
Package type:
Company Information:
Jiangsu Kaimei Electronic Material Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
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