1000º C Mbf100-10 CVD Furnace Box Furnace Melting Furnace

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Hefei Chitherm Equipment Co., Ltd.

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MBF100-10
ISO
Vertical
Industrial
Electric Holding Furnace
Ceramic Sintering
Electric
Nitrogen
640*640*250mm(W*H*D)
Chitherm
Wooden Packaging
1200*1200*1500mm
China
8514101000
Product Description
1.Equipment Name and Model: MBF100-10 Type Chemical Vapor Deposition Furnace.

2.Technical Specifications and Basic Configuration

  1. Rated Temperature: 750°C
  2. Maximum Temperature: 1000°C
  3. Heating Zone Dimensions: 770 × 770 × 300 mm (W × D × H)
  4. Effective Dimensions: 640 × 640 × 250 mm (W × D × H)
  5. Outer Chamber Material: SUS310S
  6. Inner Liner Material: Fused Quartz
  7. Product Size: Φ120
  8. Equipment Capacity: 16 substrates per batch
  9. Maximum Heating Power: 16 kW
  10. Heating Method: Bottom + Four Sides (Five-Sided Heating)
  11. Temperature Control Points: Bottom + Side, 2 points in total
  12. Thermocouple Type: K-Type
  13. Heating Rate: ≤8°C/min
  14. Heating Elements: FEC Ceramic Fiber Heaters
  15. Furnace Door Opening Method: Top-Opening Design
  16. Temperature Control Stability: ±1°C
  17. Temperature Control Instrument: Imported PID Controller with Auto-Tuning Function
  18. Program Steps: 20 steps
  19. Alarm and Protection: Over-temperature, thermocouple breakage, and other audible/visual alarms, with over-temperature power-off protection.
  20. Surface Temperature Rise: <35ºC.
  21. Weight: about 500kg.
  22. Furnace Dimensions: about 1200×1200×1500mm (W×H×D);
  23. Appearance Color: light gray.
3. Delivery List
 ItemNoteQTY
Basic CompositionsFurnace 1 unit
Certificates of InspectionFurnace and major purchased components1 Set
Technical DocumentsFurnace specifications, technical documents of major purchased components, etc1 Set
Key PartsMass Flow Controller (MFC)Yamatake or HORIBA4 Set
Touch screen 1 PC
Temperature Controller 1 Set
FEC Heater 1 Set
Quartz Liner 1 Set
SparesSSR 1 PC

4. Facility Requirements

4.1 Environmental conditions: Temperature 0 - 40ºC, humidity ≤ 80% RH, no corrosive gas, no strong
airflow disturbance.
4.2 Ground requirements: level, no obvious vibration, bearing capacity > 500Kg/m.
4.3 Power conditions: capacity greater than 22kVA, 3 phases 5 lines, voltage 220/380V, frequency
50Hz(according to local situation). Live wire: yellow, green, red, neutral wire: blue, ground wire: yellow-green;
4.4 Installation site: 1500mm×1500mm×3000mm (W×H×D), installation area greater than 2.5m2.

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