316L Stainless Steel Sintered Metal Micro-Porous VCR Gasket Filter

Porous Metal Gasket Filter for Semiconductor Applications
A Reliable Solution for Protecting Precision Gas Systems:
1) Designed specifically for semiconductor gas distribution systems, this all-metal filter offers seamless compatibility with 1/4", 3/8", and 1/2" VCR standard gasket interfaces.
2) The gasket-style design ensures easy installation, making it an essential protective barrier for MFC (Mass Flow Controller) modules, precision valves, and pressure regulators.
3) Capable of withstanding temperatures up to 400°C, the Porous Metal Gasket Filter effectively blocks particle intrusion,safeguarding sensitive gas components.
4) By preventing contamination-related leaks, it extends equipment lifespan and reduces maintenance costs.
5) Available in both low-pressure and high-pressure models, this filter can be retrofitted into existing piping systems,providing a cost-effective solution for protecting precision equipment from contamination.
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Low Pressure Series
Suitable for low-pressure system pipelines
*Maximum operating pressure 0.98Mpa
*Flow range: 0~100slpm
Part Number | Pore Size | Sealing Surface Size | A | B | C |
Z01B-00640 | 0.3μm | 1/4" VCR | φ11.9mm | φ5.50mm | 1.6mm |
Z01B-00690 | 0.3μm | 1/2" VCR | φ19.20mm | φ11.2mm | 1.6mm |
Z01B-00691 | 0.3μm | 3/8" VCR | φ19.20mm | φ11.2mm | 1.6mm |
Z01B-00693 | 1.0μm | 1/4" VCR | φ11.9mm | φ5.50mm | 1.6mm |
Z01B-00694 | 1.0μm | 1/2" VCR | φ19.20mm | φ11.2mm | 1.6mm |
Z01B-00692 | 1.0μm | 3/8" VCR | φ19.20mm | φ11.2mm | 1.6mm |

Technical Parameter | Details |
Filter Material | Sintered 316L stainless steel powder |
Housing/Gasket Material | 316L stainless steel |
Surface Finish (Exterior) | Ra ≤ 1.6μm |
Surface Finish (Interior) | Polished + electropolished, Ra ≤ 0.2μm |
Maximum Operating Temperature | 400°C |
Particle Retention Efficiency | ≥99.9999999% (9 LRV) @ 100 slpm (based on MPPS, for all particles) |
Particle Size Capture | ≥0.3μm |
Compatible Sizes | 1/4'', 3/8'', and 1/2'' VCR standard gasket interfaces |
Application | Semiconductor gas distribution systems, MFC modules, precision valves, and pressure regulators |
Available Models | Low-pressure and high-pressure versions |
Material | Entirely constructed from 316L stainless steel |
Installation | Can be used as a surface-sealing filter, eliminating the need for additional work such as cutting or welding pipes for installation |
Durability | Resistant to high temperature, high pressure, and corrosion |
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Applications of Porous Stainless Steel VCR Gasket Filter
Pharmaceutical and Biotech Industries
Aerospace and High-Tech Manufacturing
Chemical Processing
High-Purity Gas Distribution
Cryogenic Gas Systems
Oil and Gas Industry

Key Benefits for Applications
*High-temperature and high-pressure resistance allows the filter to function reliably in extreme conditions.
*Corrosion resistance of 316L stainless steel ensures long service life, even in chemically aggressive environments.
*Convenient installation without the need for additional cutting or welding makes it easy to retrofit into existing systems.
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Q2. What's the delivery time ?
--Normal model 7-10 work days because we have ability to do the stock. For big order, it takes about 10-15 work days.
Q3. What is your MOQ?
-- Usually, it is 100PCS, but if we have other orders together, can help you with small QTY also.
Q4. What payment ways available?
-- Western Union, Paypal , T/T , Credit Card , online bank transfer, RMB , etc.
Q5. If sample first possible?
-- Sure, usually we have certain QTY of free samples, if not, we'll charge accordingly.
Q6. We have design, can you produce?
--Yes, welcome!
Q7. Which market do you already sell?
--We already ship to Europe, Middle East, Asia, South America , Afria, North America etc