Audited Supplier
High precision surface profile testing machine profilometer/Surface profile tester
Principle
The instrument measuring principle for rectangular coordinate measuring method, namely, through the X axis, Z1 shaft sensor, the measured parts of surveying and mapping the surface profile of the coordinates of the point, through the electrical components, will be measured by the sensor the coordinates of the point data transmission to the upper PC, the software of the original coordinate data collected in the survey were mathematical processing, marked with the required engineering survey
projects.
High precision surface profile testing machine profilometer/Surface profile tester
Function
Profile measurement function:
Dimensions: horizontal distance, vertical distance, linear distance, radius, diameter
Included Angle: includes horizontal Angle, vertical Angle and included Angle
Position tolerance: including parallelism and perpendicularity
Shape tolerance: including straightness, convexity and arc
Contour auxiliary generation: including auxiliary points, auxiliary lines and auxiliary circles
High precision surface profile testing machine profilometer/Surface profile tester
Roughness measurement function:
Roughness features: Ra, Rp, Rv, Rz, Rz (JIS), R3z, RzDIN, Rzj, Rmax, Rc, Rt, Rq, Rsk, Rku, Rsm, Rs, R△ Q, Rk, Rpk, Rvk, Mr1, Mr2, Rmr
Ripple parameters: Wa, Wt, Wp, Wv, Wz, Wq, Wsm, Wsk, Wku, Wmr
Original contour parameters: Pa, Pt, Pp, Pv, Pz, Pq, Psm, Psk, Pku, Pmr
High precision surface profile testing machine profilometer/Surface profile tester
Measure range
| Item | Measure range | Resolution |
| Column | 320mm | - |
| Driver | 100mm | 0.2μm |
| Load cell | 15mm | 0.05μm |
| Sensor | ±420μm | 65536:1 |
Technical specification
| Some technical parameters of profilometer | Linear precision1 | ≤±(1.5+|0.2H|)μm |
| circular arc2 | ≤±(2+R/8)μm | |
| Angle3 | ≤±2′ | |
| straightness4 | ≤0.8μm/100mm | |
| Roughness part technical parameters | Linear precision | ≤±(7nm+3.5%) |
| salvage value of noise5 | ≤0.025μm | |
| repeatability6 | 1δ≤2nm | |
| cutoff wavelength | 0.025,0.08,0.25,0.8,2.5,8mm | |
| specified length | λcX2,3,4,5,6,7 | |
| Motion control | X axis Drive way | electric |
| Z axis Drive way | electric | |
| X axis drive speed | 0.1~10mm/s | |
| Z axis drive speed | 0.5-10mm/s |
