Htf2550-07 Heat Treatment Furnace, Tube Furnace, 1200*1700*2200mm (W*H*D)

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Hefei Chitherm Equipment Co., Ltd.

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htf2550-07
ISO
Horizontal
Industrial
Electric Holding Furnace
Steel Molding
Electric
Vacuum
Ø250*500mm
5×10-4PA
Chitherm
Wooden Packaging
1200mm*1700mm*2200mm(W*H*D)
China
8514101000
Product Description
Typical applications:
The sintering and annealing process of electronic components, semiconductor wafers, and other related materials in a vacuum environment.


Parameter characteristics:

1. Rated Temp: 500 ºC
2. Max Temp: 700 ºC
3. Tube Material: Fused Silica
4. Effective Dimensions: Ø250 × 500mm (D × H);
5. Temp Uniformity: ± 2 ºC
6. Temp Zones: 3 Zones
7. Temp Zone Length: 300+300+300mm
8. Heat Power: 24kW
9. Insulation Power:
8kW
10. Heating up Speed:
15ºC/min
11. Thermocouple:Type K
12. Process Steps: 9 Steps
13. Max Vacuum Level: 5 × 10-4Pa
14. Working Vacuum Level: 1 × 10-3Pa
15. Vacuum Speed:
60min (up to 5 × 10-4Pa)
16. Alarms: Over temperature, vacuum level, gas air pressure, motor overload, and power lines reversed etc
17. Furnace Dimensions: 1200mm×1700mm×2200mm(W×H×D)

Delivery Checklist
 
 NameMain Contents   Quantity
 Basic Components
 
Furnace Main Unit 1 unit
Inspection CertificateCertificates for Major Purchased Components1 set
Technical Documents Manual; Technical documents for major purchased components1 set
Key ComponentsHeating ElementCustomized1 piece
Rotary Vane Vacuum Pump4L/s BaoSi DRV161 set
 
Quartz TubeCustomized1 unit
Vacuum FlangeCustomized1 set
Touch ScreenKunlun Tongtai TPC1071Gn1 unit
Temperature Control Module Yamatake NX-D151 unit
 Molecular Pump600L/s FF-160/6201 unit
Compound Vacuum GaugeRuibao ZDF-5227AZ1 set
Spare PartsSolid State Relay 1 piece
Operating conditions
1 .Environmental Conditions: Temperature 0-40ºC, Humidity ≤80% RH, no corrosive gases, no strong airflow disturbance;
2. Water Supply Requirements: Clean, non-corrosive, water pressure 0.1-0.3 MPa, water consumption 2-5 L/min, temperature ≤25ºC;
3. Gas Supply Requirements:
High-purity nitrogen gas (process protective gas): Purity >99.999%, working pressure 0.1-0.2 MPa, consumption 2-6 m³/h;
Dry, clean, oil-free compressed air (conveyance gas): Inlet pressure 0.4-0.8 MPa;
4. Ventilation System: Non-contact connection to user exhaust system, exhaust capacity >10 m³/h;
5. Floor Requirements: Level, no significant vibration, load-bearing capacity >500 kg/m²;
6. Power Supply: Capacity >35 kVA, 3-phase 5-wire, AC 380 V, frequency 50 Hz. Live wires: Yellow, Green, Red; Neutral wire: Blue; Ground wire: Yellow-green;
7. Installation Space: 3000×1500×3000 mm (D×W×H), installation area >5 m².
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