
No | Item | Data |
1 | Power | 2000W |
2 | Frequency | 40 kHz |
3 | Voltage | 380V(±10V) |
4 | Device Dimension | 870(L)*740(W)*1540(H ) mm |
5 | Chamber Size | 350(L)*320(W)*320(H)mm |
6 | Tray Number | 5 trays( can be customized) |
7 | Tray Size | 300*265 mm |
8 | Vacuum Pump | Included |
9 | Gas Used | Air, N2, O2, Ar ( optional ) |
Chamber Material | stainless steel |



FARI is the the manufacturer of vacuum plasma cleaner. Different chamber capacity for choose : 5L, 10L, 30L, 60L, 125L, 250L. According to different chamber capacity and different material , you can choose 40kHz and 13.56Mhz generator.
PLC+touch screen control is convenient operation and high stability plasma can 360 degree all-round cleaning for irregular shape and small products.
* Plasma cleaning surface oxides, organic pollutants of wafer, IC chip and semiconductor
* All-round plasma cleaning for irregular PA toys
* Plasma cleaner for improve optical fiber hydrophilic prior to bonding
* Plasma etching for nickel tube that better for coating
* Plasma cleaning the surface oily of medical needle for dispensing
* Plasma processing the polarizer to increase the adhesion between the crystal glass
* Active the surface of aluminum foil, copper foil and fiber textile




Exhibition-CHTF :
exhibition. Many customers have established good cooperative relationship with us. We also welcome more overseas friends to
consult us!
Customer comes first!
Quality comes first!
Value comes first!

Our Customers



A: We are manufacturer,which has established 13 years.
Q2. How many years is the warranty?
A: Item has one year warranty, if any spare part were broken, we can sent the new spare part for you in free, but you need pay the freight by yourself.
Q3. How long is your delivery time?
A: Generally, it is 3-5 working days after receiving the order and full payment if the goods are in stock or it is 4-6 working days if the goods are not in stock, it is according to order quantity.
Q4. Do you have CE certification?
A: Yes, we have CE, ROHS ,ISO9001 for guarantee the quality.
Q5. What is your terms of payment?
A: 100% full payment of T/T, Trade Assurance, Western Union.
Q6. Whether the sprayed plasma is harmful to human body?
A: Please don't worry, plasma is non-toxic and won't be harm to human body .