| Item | Description | Data | 
| 1 | Compressed medium | SF 6, N2, O2, H2,He, dry non-explosive gas | 
| 2 | Max suction pressure | 0.4MPa | 
| 3 | Max discharge pressure | 5.0MPa | 
| 4 | Flow* | 8~30Nm3/h | 
| 5 | Speed | 830~1430r/ min | 
| 6 | Air tightness | 0.01mbar L/s | 
| 7 | Motor power | 3~7.5kW | 
| 8 | Weight | 280kg | 
| 9 | Equipment dimension( Length*Width*Height) | 910*600*685mm | 










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