We offer a wide range of ceramic and metallic sputter targets,in planar and rotatable shape,a complete range of targets.
Our rotatable sputter targets are available in lengths up to 4m. Any shorter tube is available.
We are able to produce dog-bone and straight targets,depending on the material and production method requested.
Application for SiO2 and Si3N4 fim,widely used in optical glass AR film and Low-E glass film.
Material Type | Silicon Aluminum | Symbol | SiAl |
Proportion | 90:10wt%±1% | Purity | > 99.9% |
Color/Apperance | Silvery,Metallic | Density | >2.2g/cm3(>94%) |
Molding process | HPS | ||
Maximum Impurities Content Unit:PPM | Fe:200 Cu:38 Ca:60 | Ga:20 Zn:70 Ti:20 | O: 5000 N:100 |