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Products attributes of Ti sputtering target
| Name | Metal Titanium Sputtering Target (Ti Target) |
| Material | Titanium Metal Materials |
| Purity | 99.9%-99.995%, 3N,3N5,4N,4N5 |
| Size | D50.8x3mm, 2inch,3inch,Or As Request |
| Color | Metallic Color |
| Shape | Planar/Round/Plate/Rotary/Bar , As Request. |
| Surface | Polished Surface |
| Ti Density | 4.54g/cm3 |
| Ti Melting Point | 1668°C |
| Application | PVD Film Coating,Optical Thin Film Coating,Industry Usage,Process,Semidoductor area,Experiments etc |
| Related Item | Al,Mg,Cu,Ni,Co,Fe,Zn,Sn,Bi,Ga,Ge,In,V,W,Mo,Nb,Ta,Cr,Zr,Ti,Hf etc + Metal Alloy sputtering targets+Ceramic targets |
| Note | Support customize size,shape,purity,different alloy proportion etc. Contact us firstly (Price is based on size and purity) |
Item Name | High purity titanium (Ti) target |
Purity | 99.9%~99.999%,Grade1 to Grade 5 |
Shape | Square/Round, According to your request |
Available size | Round: dia 25~300mm,Thickness:3~10mm Rectangular: Length up to 1500mm Customization is available |
Certificates | ISO9001:2008, SGS, The third test report |
Technics | Vacuum Melting, Patented thermo-mechanical process |
Application | Widely used in coating processing industries A: Solar Photovoltaic Application. B: Electronic and Semiconductor Application. C: Decoration and Coating Application. etc. |
Quality Standard (99.999% Ti) | |||||
Element | Value(<ppm) | Element | Value (<ppm) | Element | Value(<ppm) |
Ag | 0.05 | Al | 0.11 | As | 0.03 |
Au | 0.05 | B | 0.01 | Ba | 0.005 |
Be | 0.005 | Bi | 0.01 | Br | 0.05 |
Ca | 0.2 | Cd | 0.05 | Ce | 0.005 |
Hg | 0.1 | Fe | 3.2 | Ga | 0.05 |
I | 0.01 | Ge | 0.05 | Hf | 0.01 |
The following table is a component analysis certificate for 5N Ti sputtering target. The analytical methods used are:
1. Analysis of metal elements using GDMS or ICP-OES;
2. Gas element analysis using LECO.
| Elements | Actual | Spec | Units | Elements | Actual | Spec | Units | Elements | Actual | Spec | Units |
| Li | <0.005 | ppm | Zn | <0.02 | ppm | Pr | <0.005 | ppm | |||
| B | <0.01 | ppm | Ga | <0.05 | ppm | Nd | <0.005 | ppm | |||
| F | <0.05 | ppm | Br | <0.05 | ppm | Sm | <0.005 | ppm | |||
| Na | <0.01 | ppm | As | <0.05 | ppm | Eu | <0.005 | ppm | |||
| Mg | <0.01 | ppm | Se | <0.05 | ppm | Ru | <0.01 | ppm | |||
| Al | 0.59 | ppm | Zr | 0.34 | ppm | Rh | <0.05 | ppm | |||
| Si | 0.16 | ppm | Nb | <0.2 | ppm | Gd | <0.005 | ppm | |||
| P | <0.01 | ppm | Mo | <0.05 | ppm | Tb | <0.005 | ppm | |||
| Cl | 0.05 | ppm | Pd | <0.01 | ppm | Cd | <0.05 | ppm | |||
| K | <0.01 | ppm | Ag | <0.02 | ppm | Be | <0.005 | ppm | |||
| Ca | <0.5 | ppm | Sn | <0.05 | ppm | Sc | <0.05 | ppm | |||
| Ti | Matrix | wt% | Sb | <0.05 | ppm | Rb | <5 | ppm | |||
| V | 0.03 | ppm | Ba | <0.005 | ppm | Yb | <0.005 | ppm | |||
| Ta | source | ppm | Dy | <0.005 | ppm | Lu | <0.005 | ppm | |||
| W | <0.01 | ppm | Ho | <0.005 | ppm | Au | <0.05 | ppm | |||
| Pt | <0.05 | ppm | Bi | <0.01 | ppm | Hg | <0.1 | ppm | |||
| Ti | <0.01 | ppm | Th | <0.0001 | ppm | Hf | <0.01 | ppm | |||
| Pb | <0.01 | ppm | U | <0.0001 | ppm | Ir | <0.01 | ppm | |||
| Re | <0.01 | ppm | Er | <0.005 | ppm | Ce | <0.005 | ppm | |||
| Os | <0.01 | ppm | Tm | <0.005 | ppm | C | <5 | ppm | |||
| Cr | 0.73 | ppm | In | <0.05 | ppm | S | 0.45 | ppm | |||
| Mn | 1 | ppm | Te | <0.05 | ppm | O | 270 | ppm | |||
| Fe | 7.7 | ppm | I | <0.05 | ppm | N | 5 | ppm | |||
| Co | <0.005 | ppm | Cs | <0.01 | ppm | H | <1 | ppm | |||
| Ni | 0.05 | ppm | La | <0.005 | ppm | ||||||
| Cu | 0.58 | ppm | Ge | <0.005 | ppm |
