These valves are the result of a long period of careful research and development aimed at ensuring product quality, reliability and value. We have made every effort to provide a range of valves to suit the requirements of different users. These valves are designed to operate reliably in a wide range of applications, including the presence of chemicals and particulates. These valves operate reliably in a variety of applications, including semiconductor production systems where chemical and particulate contamination is present. |
Valve Body | 304 stainless steel (other materials available on request) |
Bays | 304 stainless steel (other materials available on request) |
Bellow | Welded 316/ AM350 (optional) |
Solenoids | Optional |
Position Indicator | Optional |
Seals | FKM O-ring |
Leak Rate | 1.3x10-9 mbar.l/s |
Pressure Range | 1x10-9 mbar to 1000 mbar FKM seals |
Max. Pressure Before Opening | 1.2 Bar |
Working Air Pressur | 4~6.5 kg/cm2 |
Cycles before Maintenance | With Bellow:16 to 50 ~ 500,000; 63 to 150 ~ 250,000; 200 to 250 ~ 80,000 |
Without Bellow:16 to 50 ~ 200,000; 63 to 250 ~ 100,000 (Depends on o-ring condition) (Vertical mounting recommended for non-bellows type) |
Baking Limits | Baking Temperature | Valve Body | O-ring Bonnet seals | Open≤100ºC |
Close≤100ºC | ||||
Metal Bonnet seals | Open≤200ºC | |||
Close≤150ºC | ||||
Manual and pneumatic actuators | ≤80ºC |




















The 16th International Vacuum exhibition 2021 in Beijing

The 16th International Vacuum exhibition 2021
