Model | VMS-6060H | VMS-6090H | ||
Working table | X, Y -axis travel(mm) | 640×770 | 640×1070 | |
Z-axis travel (mm) | 200 (focusing and auxiliary measurement) | |||
Glass table size(mm) | 640×940 | |||
Working airpressure | 0.4MPa±0.02 | |||
Digital measuring system | Linear scale resolution: 0.0005mm | |||
0.7~4.5X zoom lens. Total magnification: 20~128X | ||||
X, Y-axis motor speed | <300mm/s | |||
Z-axis motor speed | <50mm/s | |||
Dimension (L×W×H) | 1500×1300×1510 | 1800×1300×1510 | ||
Weight (kg) | 1281 | 1500 |
1 | Long stroke contributes to wide measuring range. |
2 | The self-developed measuring software QMS3D has meet various requirements of customers. |
3 | With features like auto focusing, auto edge finding, powerful programming, and auto measuring, etc. |
4 | Adopts subpixel subdivision technique to improve resolving power of boundary. |
5 | Equipped with joystick, which is also able to be programmed by software. |
6 | SPC data processing system and large quantities of jig measurement. |





