Wafer Fabrication Epitaxial Sic Coating Susceptor Video, Demo, How It Works & Features
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Product Specifications
Model NO.:
CVD SIC COATING
Coating Color:
Silver Grey
Application:
Semiconductor Epitaxy
Feature:
Corrosion Resistant, Oxidation Resistant, Heat Resistance, Wear Resistance
Coating Structure:
Thin Film
Coating Material:
Sic
Substrate:
Isostatic Graphite
Coating:
β-Sic
Coating Thickness:
100-150μm
Flexural Strength:
≥50MPa
Material Consistency:
Over 95%
Material Purity:
99.9995%
Trademark:
DZ
Transport Package:
Wooden Box
Specification:
Customizable
Origin:
China