Audited Supplier
RoHS
Dicing Chucks Cleaning Chucks Printing Chucks
Mechanical Transmission
Solid
Alumina / Silicon Cabide Porous Ceramic
Ceramic Plates
Mg/Cm2 ≤10
40%
Punching, Decoiling, Moulding
2.3-2.5 G /Cm3
≥600
30μm
MPa ≤10
Hra ≥50
Mg/Cm2 ≤20
MPa ≥40
INNOVACERA
Customized
Customized
Fujian, China
Product Description
Porous Ceramic Chuck Table Plate for Vacuum Chuck The ceramic chuck table is applied to the fields of
silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package
component substrate, optical component thinning, cutting and so on.
silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package
component substrate, optical component thinning, cutting and so on.
Main Appication field:
· New, and refurbished, porous ceramic chucks for Disco, K&S, Applied materials TSK, Micro Automation,Load
Point etc dicing saws and grinders
· New, and refurbished, porous ceramic chucks for Disco, K&S, Applied materials TSK, Micro Automation,Load
Point etc dicing saws and grinders
· 4",5",6",8,"12" regular size available in round, square, oval shape or irregular shapes and sizes
INNOVACERA porous ceramic vacuum chucks are available for for thin film substrates and flat fragile materials with
different shapes and sizes.The superb flat surface of porous ceramic distributes the vacuum force equally to
mitigate potential deflection.
We have developed: Dicing Chucks Transparent Chucks Cleaning Chucks Printing Chucks Thinning Chucks
mitigate potential deflection.
We have developed: Dicing Chucks Transparent Chucks Cleaning Chucks Printing Chucks Thinning Chucks
Alumina Porous Ceramic Material Properties | ||
Properties | Units | Value |
alumina(Al2O3) | wt% | ≥ 80 |
silicon dioxide(SiO2) | wt% | 16-18 |
density | g /cm3 | 2.3-2.5 |
hardness (HRA) | HRA ≥ | 50.00 |
flexure strength | MPa ≥ | 40.00 |
compressive strength | ≥ | 600.00 |
porosity | % | 40.00 |
Pore size | μm | 30.00 |
working pressure | MPa ≤ | 10.00 |
acid resistance | mg/cm2 ≤ | 10.00 |
alkali resistance | mg/cm2 ≤ | 20.00 |
