Direct Imaging Lithography Machine with Advanced Air Float Platform Technology

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Jiangsu Himalaya Semiconductor Co., Ltd.

VIP   Audited Supplier 3 years
Profile Certified by SGS/BV
DPS-04
Provide
New
ISO
12 Months
Automatic
Vertical
Electric
Direct Imaging Lithography
Hard Board, Soft Board
Factory Price
Provided
Himalaya
Customized or Wooden Box Packaging
Standard Specifications
China
Product Description
Product Description
DPS-04 Product advantages
High resolution optical lens improves line quality
Automatic optical focusing integration technology to overcome the uneven thickness of the board
Advanced air float platform technology
Single table standard model
Maximum substrate size610mm×630mm (24"× 24")
Minimum substrate size300mm×300mm (12"× 12")
Substrate thickness0.1mm~5.0mm
Analyze4μm/4μm
Resolution200nm
Linewidth accuracy±0.4μm
Depth of focus±200μm (AutoFocus)
Alignment accuracy±2μm@610mm×630mm
Capacity<42s/pcs @ 610mm×630mm & 100mj/cm²&Each piece of four-point counterpoint X
Imaging materialphotoresistance or high sensitivity dry film
Light source spectrum405±5nm
Exposure energy10-1000mj/cm² or higher
Applicationhard board, soft board, soft and hard combined board,Wafer
Data entryGerber274X, Gerber274D, DXF
Single power supplyAC380V-50HZ-15KW(main equipment) three-phase five wire
Overall dimension(L×W×H)(Drum line)6500×1000×1500 ,DI equipment)3500×1745×2050,(Feed/discharge port + mechanical arm) 1000×1745×2050
Room temperature/humidity22ºC±2ºC, 40%-60%(non-condensation)
Basic growth and contraction managementfixed growth and contraction, automatic growth and contraction, segment growth and contraction
StampFunctionsdate, time, serial number, expansion and contraction coefficient, etc.
Data entryODB++


DPS-02 Product advantage
High resolution optical lens improves line quality
Automatic optical focusing integration technology to overcome the uneven thickness of the board.
Advanced air float platform technology
Single table standard model

Wafer size100/150/200/300mmWafer(selectable)
Analyze2μm L/S
Linewidth accuracy±10%
Depth of focus20μm
Front engraving accuracy1μm
Imaging materialphotoresist(PR)
Light source spectrum405±5nm
capacity40WPH@12inch
Exposure energy20-1000mj/cm² or higher
Total power of light source6W
Data entryGDSII, Gerber274X, ODB++
Applicable technologyFrontal exposure,The right side Alignment
Single power supplyAC380V-50HZ-8KW(Primary equipment)
Weight per unit2000kg
Overall dimension(L×W×H)1810mmL×1700mmW×2105mmH
Temperature/humidity22ºC±1ºC, 40%-60%(non-condensation)
OverlayCompensationfixed Overlay,Auto Overlay
 
Application

Exhibition & Customers

Jiangsu Himalaya Semiconductor Co., Ltd. Was established in 2019, mainly engaged in international trade and integration of semiconductor industry equipment. The equipment is currently imported and exported to over 30 countries, with over 200 customers and suppliers, aiming to control the procurement of the highest cost-effective products in the final stage for customers, and strive for one-time payment collection and risk avoidance for suppliers!
Our main products:Die Bonder,Wire Bonding,Laser Marking(ID IC Wafer),Laser Grooving,Laser Cutting(Glass Ceramics Wafers Packaging,Laser Internal Modification Machine Si /Sic Wafe,Laser Internal Modification Machine Lt/Ln Wafer,Laser Annealing Machine for Si/Sic,Automatic Dicing Saw Machine(Wafer Packaging)),Automatic Silicone Dispensing Equipment.

Packaging & Shipping

 

FAQ

Q1:How to choose a suitable machine?
A1:You can tell us the working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience. 

Q2:What is the warranty period for the equipment?
A2:One year warranty and 24 hours online professional technical support.


Q3:How to choose a suitable machine?
A3:You can tell us the request of machine function. We can recommend the most suitable machine according to our experience. 

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