MPCVD microwave plasma chemical vapor deposition equipment
mainly used in single crystal diamond and polycrystal diamond film, diamond grown, diamond film chemical vapor deposition (CVD), material surface treatment and modification, low temperature oxide growth and other fields.
System Composition
The system is composed of microwave source, wave-guide transmission system, microwave reaction cavity, sample base, water cooling system, vacuum system, gas flow system, electronic control system and other parts.
project name | model | Quantity (set / piece) | manufacturer or origin | note |
microwave source | 10kW / 2450 MHz | 1 | domestic | |
microwave transmission system | Mixer MPT-2012waveguide | 1 | domestic | |
mode converter | MPM-2050 | 1 | domestic | |
microwave reaction cavity | Downstream MPP-2050 | 1 | domestic | |
sample table and bracket system | N / A | 1 | domestic | Water cooling, one layer lifting |
gas flow system | 5 gas mass flow controller: H2, CH4, O2, N2, Ar | 5 | Japan | |
gas vacuum valve and filter | 1 set | Japan | ||
Gas system connection components | 1 set | Japan | ||
vacuum system | vacuum valve and filter | 1 | Japan | |
vacuum cavity, vacuum tube | 1 | domestic | ||
mechanical pump and vacuum valve | 1 | domestic | ||
molecular pump and supporting vacuum valve | domestic | |||
measure | resistance vacuum meter | 1 | domestic | |
film vacuum meter | 1 | domestic | ||
infrared thermometer | 1 | domestic | ||
electric control system | PLC | 1 | Germany | |
touch screen | 1 | domestic | ||
water cooling system | cooling water temperature, flow monitoring | 3 | Japan | |
Control box / cabinet | 1 | domestic | ||
voltage stabilizing power supply | Requires user configuration | |||
circulation chiller | Requires user configuration | |||
gas cylinder, stainless steel gas pipe, water pipe, power distribution, exhaust pipe | Requires user installation |
Equipments Photos:










Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact me.