Very Low Noise Seismic Mems Accelerometer Seismic Accelerometer Capacitive Accelerometer Mems Accelerometer, Accelerometer Sensor Accelerometer Chip

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Nanjing Sky Mems Technology Co., Ltd.

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Profile Certified by SGS/BV
MA1000A
Capacitive
Analog Output
1
0.05mg
Chip
ISO
Non-Customized
Voltage
4.75~5.25V
Differential Output / Single-End
SkyMEMS
Carton
LCC20 encapsulation (9*9mm)
China
9014100000
Product Description
MA1000A Very Low Noise Seismic Mems Accelerometer


Main Features
-Range:±2g~±30g, Excellent Bias Stability
-Output: Differential Output / Single-Ended Output
-Very Low Noise: 1.2μg/√Hz for ±2g Range (typical)
-Input Power Supply: 4.75~5.25V
-Embedded Self-Test Function and Temperature Sensor
-Embedded Precision Reference Voltage
-Shock Survivability: 6000g, Vibration Resistance
-Wide Operating Temperature Range: -40~+125°C



Brief Introduction
MA1000A MEMS accelerometer is the besthigh performance capacitive accelerometer adopting closed loop structure, it useshigh performance ASIC and MEMS sensor to build closed-loop system, andit enjoys excellent performance with low noise, dynamic range, non-linearity, repeatability, temperature drift and shock resistance. MA1000A guarantees confident and accurate vibration measurement in rugged environments.
MA1000A accelerometer also has embeddedself-test function, temperature sensor for compensation and built-in high precision reference voltage, which ensures MA1000A to be the top level of accelerometer around the world. Using tiny sealed LCC20 encapsulation (9*9mm), MA1000A has been widely used in Seismic Monitor, Micro-vibration Monitoring, Engineering Geophysical Exploration, Inertial Navigation, Structure/Building Monitoring, Surface Wave Detection, and Platform Stability, etc. Eachaccelerometer is fully tested and qualified, and its superreliability and excellent performance gains customers' high praise



Technical Specifications
ParameterMA1000AUnit
MA1002AMA1003AMA1005AMA1010AMA1030A
Range±2±3±5±10±30g
Non-linearity (full range)0.10.10.10.10.1%
Frequency Response (±5% bandwidth)>100>100606060Hz
Frequency Response (±3dB bandwidth)>1000>1000200200200Hz
Noise Spectral Density(@100Hz)1.21.51.82.53μg/√Hz
Bias Temperature Coefficient (maximum)0.30.30.30.30.3mg/ºC
Bias Stability (1hour, 1σ, 1s)0.050.050.050.050.05mg
Scale Factor18001200720360120mV/g
Scale Factor Temperature Coefficient5050505050ppm/ºC
Scale Factor Stability5050505050ppm
Scale Factor Repeatability5050505050ppm
Axis misalignment
Input Axis Misalignment (Kp,Ko) 10 (max.)mrad
Self Test
Frequency (Square wave output) 19Hz
Duty cycle50%
Amplitude (Peak to peak)0.280.550.550.550.55 
  g
STEN Input Threshold Voltage (High level is valid)0.8 (min.)Vcc
Temperature Sensor
Output Voltage (@25°C)2.47V
Sensitivity8.3mV/ºC
Output Current Load20 (max.)μA
Output Capacitive Load30 (max.)pF
Reset
RSTN Input Threshold Voltage0.2 (max. , Low level is valid)Vcc
Power Supply (Vcc)
Input Voltage5V
Running Current Consumption5.4mA
Startup Time (Turn on or RSTN pull-up)10ms
Accelerometer Output
Output Voltage±3.6 (full range differential output)V
Resistance Load10 (min.)
Capacitive Load30 (max.)pF


Typical Applications
- Seismic Monitor

- Micro-vibration Monitoring


- Inertial Navigation


- Structure/Building Monitoring


- Platform Stability



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