HPM10V is a piezoresistive vacuum gauge. It uses a silicon piezoresistive sensor as the sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. The diffused silicon chip inside the sensor is encapsulated by a stainless steel 316L diaphragm and cavity. A specially developed dedicated circuit board ensures stable and reliable performance and a compact appearance.
- Vacuum application
- Laboratory and research and development
- Semiconductor industry
- Vacuum packaging
- Plasma etching process equipment
- Silicon piezoresistive principle
- High precision and good stability
- Detection is not affected by gas type and composition
- Fast response and low hysteresis
- Direct pressure measurement, analog output signal is proportional to the measured pressure
- Support various pressure interfaces KF, CF, VCR, etc. in the vacuum industry
| Measuring Range | ||||||||||||
| Absolute (kPa) | Rated pressure | 10 | 20 | 50 | 100 | 150 | 200 | |||||
| Overload | 100 | 100 | 150 | 200 | 400 | 400 | ||||||
| Note: For other measuring ranges, please contact us. | ||||||||||||
| Measuring Medium | ||||||||||||
| Type | Various gases compatible with contact materials | |||||||||||
| Output Signal/Power Supply | ||||||||||||
| Standard | 4~20mA / Vs=10~30 VDC | |||||||||||
| Standard | 0~5VDC /Vs=8.5~30 VDC | |||||||||||
| Standard | 0~10VDC /Vs=12~30 VDC | |||||||||||
| Standard | RS485 /Vs=10~30 VDC | |||||||||||
| Performance | ||||||||||||
| Accuracy | ±0.25%FS (typical) ±0.1%FS (optional) | |||||||||||
| Long-term stability | ±0.30%FS/year, ≤35kPa ±0.20%FS/year, >35kPa | |||||||||||
| *Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) | ||||||||||||
| Environment Conditions | ||||||||||||
| Temperature range | Working temperature: -40~100ºC Ambient temperature: -30~85ºC Storage temperature: -30~85ºC | |||||||||||
| Protection grade | IP65 | |||||||||||
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| DIN43650 | M12x1 4P |
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| Cable outlet | M12x1 4P with cables |
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| Item | Type | |||||||
| HPM10V | Piezoresistive Vacuum Gauge | |||||||
| Range | Pressure Range | |||||||
| (0~X)kPa | Fill X directly. Also support Torr or mbar | |||||||
| Item | Output | |||||||
| B1 | 4~20mA | |||||||
| B3 | 0-10V | |||||||
| B4 | 0-5V | |||||||
| B7 | RS485 | |||||||
| Item | Process Port | |||||||
| VKF16 | DN 16 ISO-KF | |||||||
| VCF16 | DN 16 CF | |||||||
| VT4 | 0.5'' outer tube | |||||||
| VT2 | 0.25'' outer tube | |||||||
| VR8M | 1/2 VCR Female, swivel joint. | |||||||
| VR4M | 1/4 VCR Female, swivel joint. | |||||||
| VR4F | 1/2 VCR male, swivel joint. | |||||||
| VP1 | M20*1.5 Male | |||||||
| Item | Electronic output | |||||||
| C1 | DIN43650 | |||||||
| C2 | Cable outlet | |||||||
| C5 | M12*1 | |||||||
| CD15 | 15 Pins, D-sub connector | |||||||
| Item | Sensor | |||||||
| M1 | SS316L Silicon Piezoresistor | |||||||
| Item | Housing material | |||||||
| S4 | 304 | |||||||
| S6 | 316L | |||||||
| Item | Additional Function | |||||||
| A | Absolute(typical) | |||||||
| QF | Delivery inspection report | |||||||
| Other customized requirements | ||||||||
| HPM10V | (0~80)kPa | B1 | VKF16 | C2 | M1 | S6 | A | |





1. Q: Are you a manufacturer or trading company?
A: We are a manufacturer which focuses on sensors for 10 years.
2. Q: What's your quality control system?
A: MC, ISO9001, CE Certificated.
3. Q: What is the warranty of your products?
A: Our warranty time is 18 months after shipment.
A: We could accept T/T, Paypal, WU.








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