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Lab 2L 500W 1000W Optical Glass Wafer Vacuum Plasma Etching Cleaner Plasma Cleaning Machine

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Product Specifications

Model NO.:

TN-PC13.56M-2L-1000Q

After-sales Service:

12 Months

Warranty:

12 Months

Application:

Cleaning Machine

Cleaning Media:

Plasma Cleaning

Automation:

Automatic

Cleaning Precision:

Ultra-Precision Industrial Cleaning

Control:

PLC

Principle:

Physical Cleaning

Certification:

CE

Condition:

New

Customized:

Customized

Feature:

High Efficiency

Chamber Material:

High Purity Quartz

Chamber Size:

φ120mm*280mm

RF Power:

0-500/1000W Continuously Adjustable

Frequency:

13.56MHz

Gas Channel:

2

Vacuum Pump:

Rotary Vane Vacuum Pump

Total Power:

1000W/1500W

Total Weight:

78kg

Trademark:

TN

Transport Package:

Wooden Box

Specification:

540mm*650mm*600mm

Origin:

Henan China

HS Code:

8486209000

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