Rie Machine-RF Reactive Ion Etching

Price $150000.00 Compare
Min Order 1 Piece
Availability In Stock
Shipping From Guangdong, China
Popularity 458 people viewed
Quantity
+-
 

Guangzhou Minder-Hightech co.,Ltd

VIP   Audited Supplier 9 years
Profile Certified by SGS/BV
MD-200RIE
Installation, Training
One Year Warranty
Electrical Etching Machine
Silicon-Based:Si/Sio2/Sinxsic
Corrosion & Hollowed-out
ISO9001: 2000, CE
Reactive Ion Etching
High Precision
New
Minder-Hightech
Wooden Case
1170*750*1080mm
China
Product Description
Reactive ionomer etching machine
ItemMD150-RIEMD200-RIEMD200C-RIE
Product size≤6 inches≤8 inches≤8 inches
RF power source0-300W/500W/1000W Adjustable,automatic matching
Molecular pump-/620(L/s)/1300(L/s)/CustomAntiseptic620(L/s)/1300(L/s)/Custom
Foreline pumpMechanical pump/dry pumpDry pump
Process pressureUncontrolled pressure/0-1Torr controlled pressure
Gas typeH/CH4/O2/N2/Ar/SF6/CF4/
CHF3/C4F8/NF3/Custom
(Up to 9 channels, no corrosive & toxic gas)
H2/CH4/O2/N2/Ar/F6/CF4/ CHF3/C4F8/NF3/Cl2/BCl3/HBr(Up to 9 channels)
Gas range0~5sccm/50sccm/100sccm/200sccm/300sccm/500sccm/custom
LoadLockYes/NoYes
Sample tem control10°C~Room tem/-30°C~100°C/Custom-30°C~100°C /Custom
Back helium coolingYes/NoYes
Process cavity liningYes/NoYes
Cavity wall tem controlNo/Roomtem~60/120°CRoom tem-60/120°C
Control SystemAuto/custom
Etching materialSilicon-based:Si/SiO2/SiNx···
IV-IV: SiC
Magnetic materials/alloy materials
Metallic material: Ni/Cr/Al/Au.....
Organic material: PR/PMMA/HDMS/Organic
film......
Silicon-based: Si/SiO2/SiNx......
III-V(3): InP/GaAs/GaN......
IV-IV: SiC
II-VI (3): CdTe......
Magnetic materials/alloy materials
Metallic material: Ni/Cr/A1/Au......
Organic material: PR/PMMA/HDMS /organic film...

Process result
Silicon-based material etching
Silicon-based materials, nano-imprint patterns, array
patterns and lens pattern etching

InP normal temperature etching
Pattern etching of InP based devices used in optical communication, including waveguide structure, resonant cavity structure ridge structure etc

SiC material etching
Suitable for microwave devices, power devices, etc


Physical sputtering, etching  Organic materiale tching
It is applied to the etching of difficult to etch materials such as some metals (such as Ni / Cr) and ceramics, and the patternede tching of materials is realized by physical bombardment.It is used for etching and removal of organic compounds such as photoresist (PR)/ PMMA / HDMS / polymer

Cermet film material (Au/Ni/Cr/Al2O3)

  • Contact Supplier
Message Type
* Message Content
* Name  
* Phone
* Email
* CAPTCHA  
$5450.00 1 Set(MOQ)

Solid and Liquid Surface Testing Machine Contact Angle Measuring Device Optical Contact Angle Tester Contact Angle Measurement Equipment Optical Tensiometer

Guangzhou Minder-Hightech co.,Ltd
$100000.00 1 Piece(MOQ)

Automatic Capacitor Winding Machine Equipment Auto Winding Machine Capacitor Manufacturing Equipment

Guangzhou Minder-Hightech co.,Ltd
$2500.00 1 Piece(MOQ)

Professional Clock Analyzer / Timegrapher for Quartz Watches with 32kHz Quartz Oscillator Frequency Signal

Guangzhou Minder-Hightech co.,Ltd
$4590.00 1 Set(MOQ)

Manual 5000A/8000A Inverter DC Spot Welding Machine for LiFePO4 Cells/EV Battery/Energy Storage Battery Pack Making

Guangzhou Minder-Hightech co.,Ltd
$60000.00 1 Set(MOQ)

Acid Etched Frosted Glass Machinery

Shahe Biyoute Glass Co., Ltd.
$150000.00 1 Piece(MOQ)

Semiconductor Device Fabrication Fab Wafer Fabrication Etching Inductively Coupled Plasma Etching Machine Icp for Si/Sio2/Sinx/ Sic Beol Feol

Guangzhou Minder-Hightech co.,Ltd
$150000.00 1 Piece(MOQ)

Rie Machine-RF Reactive Ion Etching

Guangzhou Minder-Hightech co.,Ltd
$9500.00 1 Set(MOQ)

dB5060 High-Precision Steel Die Making Machinery for Efficient Production

Beijing Golden Eagle Electronic Equipment Co., Ltd.
$3950.00 1 Piece(MOQ)

Zinc and Magnesium Plate Chemical Etching Machine for Photoengraving

Zibo Jucos Co., Ltd.
$30000.00 1 Piece(MOQ)

DJ980-EL Hot Stamping CNC Engraving Machine

Changzhou Kuaile Science and Technology Co., Ltd.